UpTime System

The UpTime™ system is a sub-atmospheric delivery dopant gas package designed to be an alternative solution to existing adsorbent-based technology used in ion implanters. The UpTime system offers robust safety features, increases productivity and lower cost of ownership. The UpTime product family encompasses the three primary gases for ion implantation–arsine, phosphine and isotopically enriched boron trifluoride.

The UpTime system, designed for safety, offers two different types of safeguards–mechanical actuator and flow restrictor.