The UpTime™ system is a sub-atmospheric delivery dopant
gas package designed to be an alternative solution to existing
adsorbent-based technology used in ion implanters. The UpTime
system offers robust safety features, increases productivity
and lower cost of ownership. The UpTime product family encompasses
the three primary gases for ion implantation–arsine, phosphine
and isotopically enriched boron trifluoride.
The UpTime system, designed for safety, offers two different
types of safeguards–mechanical actuator and flow restrictor.