Electrostatic Chucks

Praxair Electronics offers a product line of advanced electrostatic clamping (ESC) devices and precision chamber components for the semiconductor industry. Our ESC technology offers significant advantages over conventional clamping of silicon wafers, and our patented multilayer ceramic electrostatic technology offers many application-specific solutions. ESCs increase edge utilization and process yield through removal of the mechanical clamp ring, reduce contamination of the chamber due to deterioration of the mechanical clamp ring, and optimize heat transfer capability. Praxair’s ESCs are manufactured using high-purity materials at our facility in Poughkeepsie, New York.